Lambda-Physik LPF 202 Excimer Laser, F2 Version
Inquire- Manufactured by:
- Lambda-Physik
- Model number:
- LPF 202 Excimer Laser, F2 Version
- Year manufactured:
- 2001
- Condition:
-
Visibly good condition
- Asking price:
- $2,500
- Price when new:
- $105,000
- Included extras:
- Manual
Warranty
Demonstratable
Training
Installation - Equipment location:
- Austria
- Additional information:
- Max. repetition rate 20 Hz Electrical: 380 - 400 V AC, 12 A, 50 Hz, 3-phase Dimensions (laser head) L x W x H 1966 x 475 x 800 mm³ Weight (with power supply and pump): 550 kg Condition: used Commissioning: 2001 Functionality: Control and pump are functioning, last laser operation in 2011 Filling: Inert gas User Manual: available Delivery scope: laser head, handheld keypad, power supply, vacuum pump (See picture) From our experience, the system will need several new gas fills before it will operate as laser with sufficient pulse energy. Might also require a new window or mirror, as the installed MgF window and mirror are hydroscopic.
- For use with following Gases:
- F2,ArF
- Pulse Energy (mJ):
- 50 mJ (157 nm)
- Maximum Pulse rate (Hz):
- 20 Hz
- Pulse Width (With specific gas) (nsec):
- about 20 ns
- Item Number:
- 8167
